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OwnerKiyoshi Yamagishi, Kenji Tomonari +2inventors
InventorsKiyoshi Yamagishi, Kenji Tomonari, Shinichi Inoue, Takayuki Takahata
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A flow rate detector (5) including a heater and a temperature sensor is connected to a thermal conductor (6), and a fluid temperature detector (9) including a temperature sensor is connected to a thermal conductor (10). A housing (2) encloses the flow rate detector (5), the fluid temperature detector (9) and parts of thermal conductors (6, 10). The housing (2) also encloses a memory (1) that stores individual information of a flow rate sensor unit used for determining flow rates by using signals from a detector circuit containing the heater, the temperature sensor of the flow rate detector and the temperature sensor of the fluid temperature detector. The flow rate detector (5), the fluid temperature detector (9) and the memory (1) are connected to a plurality of leads (4) in the housing (2). The housing (2) is connected to a fluid channel (13), into which the thermal conductors (6, 10) extended. The flow rate sensor unit reduces the difference in measurment between the different sensor units.
A flow rate sensor unit in which a flow rate detector having a heater and a flow rate detecting temperature sensor is joined to a flow rate detecting thermal conductor, and the flow rate detector and a part of the flow rate detecting thermal conductor are accommodated in a housing, characterized in that said housing encloses in a space formed therein a memory for storing individual information of said flow rate sensor unit used when a flow rate value is achieved on the basis of a detection signal of a detecting circuit containing said heater and said flow rate detecting temperature sensor, and said flow rate detector and said memory are connected to plural leads in said space, said plural leads being partially exposed to the outside of said housing, wherein a fluid channel member having a fluid channel formed therein is connected to or formed integrally with said housing, and said flow rate detecting thermal conductor extends from said space into said fluid channel.
A flow rate sensor unit in which a flow rate detector having a heater and a flow rate detecting temperature sensor is joined to a flow rate detecting thermal conductor, and the flow rate detector and a part of the flow rate detecting thermal conductor are accommodated in a housing, characterized in that a fluid channel member having a fluid channel formed therein is connected to or formed integrally with said housing having a space formed therein, said flow rate detecting thermal conductor extends from said space into said fluid channel, a thermal conductor other than said flow rate detecting thermal conductor is disposed so as to extend from said space into said fluid channel, said housing encloses in the space formed therein a memory for storing individual information of said flow rate sensor unit used when a flow rate value is achieved on the basis of a detection signal of a detecting circuit containing said heater and said flow rate detecting temperature sensor, and said flow rate detector and said memory are connected to plural leads in said space, said plural leads being partially exposed to the outside of said housing.
A flow rate sensor comprising a flow rate measuring portion for detecting the flow rate of fluid, a temperature compensating measuring portion for compensating an effect of fluid temperature on measurements of said flow rate measuring portion, and a housing, wherein said flow rate measuring portion includes a flow rate detector having a heater and a temperature sensor laminated each other through an insulator, a fin plate joined to the flow rate detector at one end thereof, and an output terminal electrically connected to the flow rate detector, said temperature compensating measuring portion includes a temperature detector having an insulator and a temperature sensor that are laminated on each other, a fin plate joined to said temperature detector at one end thereof, and an output terminal electrically connected to said temperature detector, said housing encloses said flow rate detector and said temperature detector therein, and said fin plates and the output terminals of said flow rate measuring portion and said temperature compensating measuring portion are projected to the outside of said housing.
Dependencies are inferred from the claim text.