Dynamic activation for an atomic force microscope and method of use thereof
AssigneeVeeco Instruments Inc.
InventorsDennis M. Adderton, Stephen C. Minne
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Abstract
A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.
Claims14
A method of actively changing the bandwidth of amplitude detection of an AFM having a cantilever, the method comprising:
- applying an oscillating drive signal to the cantilever;
- measuring a response of the cantilever during operation;
- demodulating the response;
- and
- dynamically controlling the oscillating drive signal based on the demodulated response.
A method of actively changing the bandwidth of amplitude detection of an AFM, the method comprising:
- providing a self-actuated cantilever having a piezoelectric element disposed thereon;
- providing an active driving circuit;
- driving the self-actuated cantilever with the active driving circuit;
- scanning a surface of a sample with the self-actuated cantilever;
- during said scanning step, generating a deflection signal in response to a deflection of the self-actuated cantilever;
- operating the active driving circuit to actively modify a quality factor (Q) associated with the self-actuated cantilever in response to the deflection signal;
- and
- wherein the active driving circuit demodulates the deflection signal and uses the demodulated deflection signal to modify said driving step.
A method of actively changing the bandwidth of amplitude detection of an AFM having a cantilever, the method comprising:
- applying an oscillating drive signal to the cantilever;
- measuring a response of the cantilever during operation;
- demodulating the response using an RMS-to-DC converter to determine an amplitude of the response and to generate a corresponding amplitude signal;
- dynamically controlling the oscillating drive signal based on the demodulated response using an amplitude detection circuit;
- and
- generating an error signal based on the amplitude signal, and wherein the amplitude detection circuit includes a gain stage that applies a gain to the error signal to generate a modified amplitude signal.
Dependencies are inferred from the claim text.