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US 6,672,111 B2Granted
Method and apparatus for adding metals to fused silica
AssigneeCorning Incorporated
InventorsWilliam P. Peters, Merrill F. Sproul, Daniel R. Sempolinski, Michael H. Wasilewski
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Abstract
Methods and apparatus for adding metals such as aluminum to fused silica glass articles are disclosed. The methods and apparatus allow for controlled, low level addition of metals into fused silica glass articles. The fused silica glass articles containing added aluminum exhibit improved internal transmission and decreased absorption change when irradiated with a laser.
Claims8
A method of fabricating a bulk aluminum-doped fused silica glass article, the method comprising the steps of:
- providing a silicon-containing gas stream capable of being converted through thermal decomposition with oxidation or flame hydrolysis to silica;
- flowing a second gas stream over a powdered, organometallic aluminum-containing precursor and sublimating the precursor to saturate the gas with the organometallic aluminum-containing precursor and to provide an aluminum dopant-containing gas stream;
- mixing the silicon-containing gas stream and the aluminum dopant-containing gas stream;
- flowing the mixed gas streams into the flame of a combustion burner to form amorphous particles of aluminum doped fused silica;
- depositing the amorphous particles onto a support;
- consolidating the deposit of amorphous particles into a transparent glass body containing between 100 parts per billion and 100 parts per million of aluminum and having an internal transmittance of greater than 99.5%/cm at a wavelength of 193 nm.
3 more elements
Dependencies are inferred from the claim text.