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US 6,671,975 B2Granted
Parallel kinematic micromanipulator
OwnerC. William Hennesseyinventor
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Abstract
A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.
Claims60
A parallel kinematic device, comprising:
- a base plate;
- a mobile plate;
- and
- at least three kinematic links, wherein each of said kinematic links comprises:
- a first end interconnected to said base plate by a first joint;
- a second end interconnected to said mobile plate by a second joint;
- a slide member;
- a carrier member;
- a first piezoelectric linear actuator assembly, wherein said mobile plate can be moved with respect to said base plate with at least three degrees of freedom, and wherein said first piezoelectric linear actuator assembly comprises:
- a piezoelectric ceramic element comprising:
- a first face;
- a second face;
- and
- at least a first edge;
- a plurality of electrodes interconnected to said first face;
- a single electrode interconnected to said second face;
- and
- a finger interconnected to said at least a first edge, wherein selective electrical excitation of at least two of said plurality of electrodes causes said slide member to move relative to said carrier member.
15 more elements
A method for positioning components comprising:
- providing a mobile plate;
- interconnecting a first component to said mobile plate;
- providing a base plate;
- providing a second component wherein a position of said second component is fixed relative to said base plate;
- interconnecting said mobile plate and said base plate with a plurality of kinematic links, wherein each of said kinematic links comprises a linear piezoelectric actuator assembly;
- providing electrical excitation to at least one of said linear piezoelectric actuator assemblies, wherein said first component is selectively placed in a first position relative to said second component with a repeatability of at least about 50 nm.
3 more elements
A parallel kinematic device, comprising:
- a base plate;
- a mobile plate;
- and
- at least three kinematic links, wherein each of said kinematic links comprises:
- a first end interconnected to said base plate by a first joint;
- a second end interconnected to said mobile plate by a second joint;
- a slide member;
- a carrier member;
- a first piezoelectric linear actuator assembly, wherein said mobile plate can be moved with respect to said base plate with at least three degrees of freedom and with a resolution of about 50 nm or less.
6 more elements
A parallel kinematic device, comprising:
- a base plate;
- a mobile plate;
- and
- at least three kinematic links, wherein each of said kinematic links comprises:
- a first end interconnected to said base plate by a first joint;
- a second end interconnected to said mobile plate by a second joint;
- a slide member;
- a carrier member;
- a first piezoelectric linear actuator assembly, wherein said mobile plate can be moved with respect to said base plate with at least three degrees of freedom and wherein said piezoelectric linear actuator assembly has a resolution of less than about 50 nanometers.
6 more elements
A parallel kinematic device, comprising:
- a base plate;
- a mobile plate;
- and
- at least three kinematic links, wherein each of said kinematic links comprises:
- a first end interconnected to said base plate by a first joint;
- a second end interconnected to said mobile plate by a second joint;
- a slide member;
- a carrier member;
- a first piezoelectric linear actuator assembly, wherein said mobile plate can be moved with respect to said base plate with at least three degrees of freedom and wherein a position of said mobile plate with respect to said base plate can be repeated to within at least 50 nanometers.
6 more elements
A method for positioning components comprising:
- providing a mobile plate;
- interconnecting a fiber optic cable to said mobile plate;
- providing a base plate;
- providing a component wherein a position of said component is fixed relative to said base plate;
- interconnecting said mobile plate and said base plate with a plurality of kinematic links, wherein each of said kinematic links comprises a linear piezoelectric actuator assembly;
- providing electrical excitation to at least one of said linear piezoelectric actuator assemblies, wherein said fiber optic cable is selectively placed in a first position relative to said component;
- providing a test signal to said fiber optic cable;
- monitoring an amplitude of said test signal received by said component while said fiber optic cable is in said first position, wherein a first amplitude is detected;
- providing electrical excitation to at least a one of said linear piezoelectric actuator assemblies, wherein said fiber optic cable is selectively placed in a second position relative to said component;
- monitoring an amplitude of said test signal received by said component while said fiber optic cable is in said second position, wherein a second amplitude is detected, and wherein said first amplitude is greater than said second amplitude;
- providing electrical excitation to at least a one of said linear piezoelectric actuator assemblies, wherein said fiber optic cable is returned to said first position relative to said component with a repeatability of at least about 50 nm.
8 more elements
Dependencies are inferred from the claim text.