Method of depositing epitaxial layers on a substrate
AssigneeUT-Battelle, LLC
InventorAmit Goyal
Life of this patent
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Abstract
An epitaxial article and method for forming the same includes a substrate having a textured surface, and an electrochemically deposited substantially single orientation epitaxial layer disposed on and in contact with the textured surface. The epitaxial article can include an electromagnetically active layer and an epitaxial buffer layer. The electromagnetically active layer and epitaxial buffer layer can also be deposited electrochemically.
Claims30
A method for electrochemically depositing epitaxial layers on substrates, comprising the steps:
- providing a substrate having a textured surface;
- electrochemically depositing a substantially single orientation epitaxial layer on said textured surface.
A method for preparing an electromagnetically active epitaxial article using at least one electrochemical step, comprising the steps of:
- providing a substrate with a textured surface;
- electrochemically depositing a substantially single orientation epitaxial layer on said textured surface, and
- depositing an electromagnetically active layer on said substantially single orientation epitaxial layer.
Dependencies are inferred from the claim text.