Glass-silicon column
AssigneeThe Regents of the University of California
InventorConrad M. Yu
Life of this patent
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Abstract
A glass-silicon column that can operate in temperature variations between room temperature and about 450° C. The glass-silicon column includes large area glass, such as a thin Corning 7740 boron-silicate glass bonded to a silicon wafer, with an electrode embedded in or mounted on glass of the column, and with a self alignment silicon post/glass hole structure. The glass/silicon components are bonded, for example be anodic bonding. In one embodiment, the column includes two outer layers of silicon each bonded to an inner layer of glass, with an electrode imbedded between the layers of glass, and with at least one self alignment hole and post arrangement. The electrode functions as a column heater, and one glass/silicon component is provided with a number of flow channels adjacent the bonded surfaces.
Claims19
A glass-silicon column, comprises
- a pair of outer silicon members,
- a glass member located intermediate the outer silicon members,
- an embedded electrode,
- at least one fluid channel, and
- alignment means for said silicon members and said glass member.
A silicon-glass-silicon column comprising:
- a first outer silicon member,
- at least one glass member,
- a second outer silicon member,
- an electrode embedded in said glass member,
- at least one flow-channel intermediate said glass member and one of said silicon members, and
- a self-alignment structure located intermediate said first and second silicon members.
Dependencies are inferred from the claim text.