Methods of fabricating high transition temperature SMA, and SMA materials made by the methods

A method of fabricating ternary TiNi-based alloys having high phase-change transition temperatures and optimal thermo-mechanical properties, the method comprising the steps of providing a first material comprised of the element Ti, providing a second material comprised of the element Ni and providing a third material comprised of an element other than Ti and Ni which when alloyed with Ti and Ni can produce a shape memory alloy, the first, second and third materials being comprised of respective first, second and third targets, and forming an alloy by co-sputtering the elements of the first, second and third material onto a substrate in the form of a thin film with the alloy being characterized in having the sum of the percentage composition of the elements that are from the left side of the periodic table being substantially 50 atomic percent, and the sum of the percentage composition of the elements that are from the right side of the periodic table being the remaining 50 atomic percent.