Separation of C2F6 from CF4 by adsorption on activated carbon
AssigneeAir Products and Chemicals, Inc.
InventorsPhilip Bruce Henderson, Timothy Christopher Golden
Life of this patent
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Abstract
This invention relates to an improvement in a process for removing C2F6 as an impurity from a CF4 containing gas, preferably CF4 produced by the reaction of F2 with carbon. The improvement in the process comprises the steps: contacting the CF4 containing gas, containing C2F6 impurity, with an activated carbon having a CCl4 activity from 43 to 55 in an adsorption bed to effect adsorption of the C2F6 impurity; and, recovering purified CF4 product in the effluent from the adsorbent bed.
Claims10
In a process for removing C2F6 as an impurity from a CF4 containing gas, wherein the CF4 containing gas is contacted with an adsorbent in an adsorbent bed for selectively adsorbing C2F6, and the CF4 is recovered in the effluent from the adsorbent bed, the improvement which comprises the steps:
- contacting said CF4 containing gas, containing C2F6 impurity, with an adsorbent comprised of an activated carbon having a CCl4 activity from 43 to 55 in an adsorption bed to effect adsorption of said C2F6 impurity;
- and,
- recovering a purified CF4 product in the effluent from said adsorbent bed.
In a process for removing C2F6 as an impurity from a CF4 containing gas, wherein the CF4 containing gas is contacted with an adsorbent in an adsorbent bed for selectively adsorbing C2F6, and the CF4 is recovered in the effluent from the adsorbent bed, the improvement which comprises the steps:
- contacting said CF4 containing gas, containing C2F6 impurity, with an activated carbon having a capacity for C2F6 of at least 0.015 millimoles C2F6 per gram of activated carbon in an adsorption bed at a temperature from 25 to 30° C. to effect adsorption of said C2F6 impurity;
- and,
- recovering a purified CF4 product in the effluent from said adsorbent bed.
Dependencies are inferred from the claim text.