US 6,669,253 B2 · Wafer boat and boat holder

Abstract

A wafer boat and boat handle are designed for automatic interlocking engagement and release upon manipulation by a user. The boat includes a side rail with a lip for engagement within a slot formed in the handle, and a handle cam activating contact surface for contacting a gripping block member of the handle. The handle includes at least one boat holding block with a boat lip holding slot therewithin. The handle also includes at least one boat gripping block that is rotatably engaged with the holding block, and which includes a frontwardly projecting rail gripping flange. When the boat lip is brought into the holding block slot, the gripping block rotates and the flange is brought over the top of the rail. The boat rail is thereby held between the slot and the flange of the handle, such that the boat may be lifted and moved.

Claims10

Dependent claims

A wafer boat, comprising:

a base being adapted for holding a plurality of wafers;
at least one rail member being engaged with said base and adapted for supporting a plurality of wafers, said rail member being further adapted for supporting said boat when said rail is engaged by a boat handle;
said rail member having at least one lip portion being adapted for mating engagement within said boat handle;
and said boat also including a handle cam actuating contact surface being adapted for contacting portions of said boat handle and causing said handle to grip said rail member;
and
wherein said rail member is supported by arm members that project upwardly and outwardly from said base, and wherein said handle cam actuating contact surface is formed on portions of at least one of said arm members, and wherein said handle cam actuating contact surface is adapted to cause a gripping member portion of said handle to rotate such that a flange portion of said gripping member rotates over said rail member to frictionally grip said rail;
and
said boat being fabricated from quartz.

5 more elements

A wafer disk handling apparatus, comprising:

a wafer boat for holding at least one wafer disk;
a handle for gripping and moving said wafer boat;
said wafer boat including:
a base being adapted for holding a plurality of wafers;
at least one rail member being engaged with said base and adapted for supporting a plurality of wafers, said rail member being further adapted for supporting said boat when said rail is engaged by a boat handle;
said rail having at least one lip portion being adapted for mating engagement within said boat handle;
and said boat also including a handle cam actuating contact surface being adapted for contacting portions of said boat handle and causing said handle to grip said rail;
said handle including:
at least one boat rail holding member having a slot formed therein for receiving a portion of a boat rail therewithin;
at least one boat rail gripping member having a boat rail gripping flange, said gripping member being rotatably engaged relative to said holding member;
said flange being adapted to make frictional contact with a portion of said boat rail when said boat rail is engaged within said slot;
and
said gripping member including a cam surface disposed away from said flange, said cam surface being adapted to make frictional contact with said handle cam actuating contact surface of said boat to cause said gripping member to rotate relative to said holding member.

10 more elements

Dependencies are inferred from the claim text.

Wafer boat and boat holder

Life of this patent

Wafer boat and boat holder

Life of this patent

Abstract

Claims10