Vacuum valve
AssigneeUnaxis Balzers Aktiengesellschaft
InventorsHeinz-Hermann Kersken, Willy Maurer
Life of this patent
Estimating the term…
Abstract
A vacuum valve comprising valve housing (1), a continuous line (3) in the valve housing (1) the conductance of which is to be set; a movably supported valve body (5) extending into the line (3) and having a position (H) which defines a conductance through line (3). A setting device (11) is connected to the valve body (5) and having a setting displacement. Locally offset snap-in devices (22; 29, 30) along this setting displacement and effective for snap receiving the setting device (11) for setting displacement positions, the snapping-in at each of the snap-in devices (22; 29, 30) being releasable again by increasing a driving force acting on the setting device (11).
Claims12
A vacuum valve comprising:
- a valve housing having a continuous line;
- a movably supported valve body in said valve housing having a movement path relative to said valve housing, the position of said movably supported valve body along said movement path defining a respective conductance through said line;
- a displaceable setting device operationally acting upon said movably supported valve body, thereby setting said position and having a displacement path;
- snap-in devices along said displacement path for snap-in positioning said setting device at predetermined positions along said displacement path;
- said snap-in devices being releasable again by an increase of a displacement force acting upon said setting device;
- said movement path having two ends;
- and wherein at least one of the subsequent is valid:
- the extent of said movement path from one of said ends to a first next subsequent position as set by said setting device at a first predetermined position is different from an extent of said movement path from said first next subsequent position to a further next subsequent position as set by said setting device at a second predetermined position;
- and
- the extent of said movement path from a first position as set by said setting device at a first predetermined position to a second position as set by said setting device at a second and next subsequent predetermined position is different from the extent from said second position to a third position as set by said setting device at a third next subsequent predetermined position.
Dependencies are inferred from the claim text.