Resonator for ultrasonic wire bonding
AssigneeUltex Corporation
InventorShigeru Sato
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Abstract
The bonding position between a bonding wire and an electrode is maintained accurately, an ultrasonic horn is mounted to a bonding machine by the attachment portions of support portions situated at minimum vibration amplitude points equally distant from a capillary in opposite directions in such a manner that it is supported on both sides, and the ultrasonic horn, capillary and bonding work portion are vibrated by ultrasonic waves to bond the end portion of the bonding wire.
Claims9
A resonator for ultrasonic wire bonding, wherein an ultrasonic horn comprises support portions located at minimum vibration amplitude points on both sides of a capillary for passing a bonding wire therethrough.
Dependencies are inferred from the claim text.