Pivot-less watt linkage, pivot-less watt linkage-based suspension and micromachined device incorporating same

A pivot-less Watt linkage-based suspension for supporting a first rigid element relative to a second rigid element to permit relative motion therebetween, the suspension comprising pivot-less Watt linkages, each including:

• an elongate, rigid, floating beam;
• an elongate first flexible beam extending in a first direction from a first point on said floating beam to the first rigid element;
• an elongate second flexible beam extending in a second direction, substantially opposite said first direction, from a second point on said floating beam to said first rigid element, said second point being spatially separated from said first point along the length of said floating beam;
• and
• a flexible member extending in said first direction from a third point on said floating beam to the second rigid element, said third point being intermediate between said first point and said second point.

A micromachined device, comprising:

• a first rigid element;
• a second rigid element;
• and
• a pivot-less Watt linkage-based suspension for supporting said first rigid element relative to said second rigid element to permit relative motion therebetween, said suspension including pivot-less Watt linkages, each comprising:
• an elongate, rigid, floating beam,
• an elongate first flexible beam extending in a first direction from a first point on said floating beam to said first rigid element,
• an elongate second flexible beam extending in a second direction, substantially opposite said first direction, from a second point on said floating beam to said first rigid element, said second point being spatially separated from said first point along the length of said floating beam, and
• a flexible member extending in said first direction from a third point on said floating beam to said second rigid element.