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US 6,668,641 B2Granted
Apparatus and method for thermal dissipation in a thermal mass flow sensor
AssigneeMKS Instruments, Inc.
InventorsJesse Ambrosina, Ali Shajii
Life of this patent
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Abstract
A thermal mass flow controller includes a sensor assembly, a valve assembly, and a mass flow controller housing. A thermally conductive element conducts heat from the valve assembly away from the sensor assembly, thereby reducing uncontrolled contributions of heat to the sensor assembly.
Claims11
A thermal mass flow controller comprising:
- a thermal mass flow controller housing including a fluid input port and a fluid output port and a bypass channel disposed between the input and output ports;
- a thermal mass flow sensor assembly mounted to the thermal mass flow controller housing for measuring a flow of fluid through the bypass channel;
- a valve assembly mounted to the thermal mass flow controller housing for controlling the flow of fluid through the bypass channel;
- and
- a heat sink device thermally coupled to the valve assembly for conducting thermal energy from the valve assembly.
2 more elements
Dependencies are inferred from the claim text.