Scanning probe system with spring probe

A scanning probe system for probing a sample, the scanning probe system comprising:

• a stage having a surface for mounting the sample;
• a probe assembly including a substrate and a spring probe having a fixed end attached to the substrate, a central section separated from the substrate, and a free end including a probe tip positioned adjacent to the stage surface;
• and
• a measurement device for measuring deformation of the spring probe caused by interaction between the probe tip and the sample,
• wherein the spring probe is formed such that it has an internal stress gradient in the growth direction.

A scanning probe system for probing a sample, the scanning probe system comprising:

• a stage having a surface for mounting the sample;
• a probe assembly including a substrate and a spring probe having a fixed end attached to the substrate, a central section separated from the substrate, and a free end including a probe tip positioned adjacent to the stage surface;
• and
• a measurement device for measuring deformation of the spring probe caused by interaction between the probe tip and the sample,
• wherein the measurement device comprises:
• a laser for generating a laser beam that is directed to strike a selected section of the spring probe;
• and
• a photosensor array positioned to receive portions of the laser beam reflected from the selected section of the spring probe,
• wherein the substrate of the probe assembly is transparent, and
• wherein laser is positioned such that the laser beam is directed from the laser to the selected section of the spring probe through the transparent substrate, and
• wherein the photosensor array is positioned such that the portions of the laser beam reflected from the selected section of the spring probe pass through the transparent substrate.

A scanning probe system comprising:

• a stage for mounting a sample to be measured;
• a probe assembly including a substrate mounted over the stage, and a probe having a tip that is positioned to interact with a surface of the sample to be measured;
• and
• a measurement system for measuring displacement of the probe tip relative to the surface of the sample to be measured,
• wherein the probe includes a spring probe having a fixed end attached to the substrate, a central section separated from the substrate, and a free end including said tip, and
• wherein the spring probe comprises a stress-engineered spring material film having an internal stress gradient.

A method for measuring a sample using a scanning probe system, the method comprising:

• mounting onto the scanning probe system a probe assembly including a substrate and a spring probe having a fixed end attached to the substrate, a central section separated from the substrate, and a free end including a probe tip, wherein the spring probe comprises a stress-engineered spring material film having an internal stress gradient;
• causing the probe tip to interact with the sample;
• and
• measuring deformation of the spring probe caused by said interaction between the probe tip and the sample.

A scanning probe system for probing a sample, the scanning probe system comprising:

• a stage having a surface for mounting the sample;
• a probe assembly including a substrate and a spring probe having a fixed end attached to the substrate, a central section separated from the substrate, and a free end including a probe tip positioned adjacent to the stage surface;
• and
• a measurement device for measuring deformation of the spring probe caused by interaction between the probe tip and the sample,
• wherein the fixed end of the spring probe has a width that is greater than a width of the central section, and
• wherein the central section and free end of the spring probe includes one or more straight sections, each straight section including a material stack deposited onto the free end, wherein the material stack has an internal stress gradient that is opposite to the internal stress gradient of the spring probe.