Method for producing a stacked piezoelectric element
AssigneesCanon Kabushiki Kaisha, Taiheiyo Cement Corporation
InventorsYutaka Maruyama, Nobuyuki Kojima, Toru Ezaki, Takahiro Yamakawa
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AssigneesCanon Kabushiki Kaisha, Taiheiyo Cement Corporation
InventorsYutaka Maruyama, Nobuyuki Kojima, Toru Ezaki, Takahiro Yamakawa
Estimating the term…
A method for producing a stacked piezoelectric element alternately stacks a plurality of layers of an electrode material and piezoelectric layers having an electric mechanical energy converting function and provided with penetrating electrodes, obtained by forming through holes in each piezoelectric layer and filling the through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sinters the stacked layers. The method includes the step of forming, on a layer of the electrode material, a second layer of electrode material by screen printing at a peripheral area of the contact portion between the layer of the electrode material and the penetrating electrodes.
A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, comprising a step of:
A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, comprising a step of:
A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, comprising a step of:
A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, comprising a step of:
Dependencies are inferred from the claim text.