Method and apparatus for optimizing downstream uniformity
AssigneeAdvanced Micro Devices, Inc.
InventorsAlexander J. Pasadyn, Christopher A. Bode
Life of this patent
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Abstract
A method includes measuring a characteristic of a workpiece at a plurality of locations. A uniformity profile is generated based on the characteristic measurements. At least one acceptable region of the workpiece is identified based on the uniformity profile. At least one unacceptable region of the workpiece is identified based on the uniformity profile. The uniformity profile is filtered to remove at least a portion of the characteristic measurements associated with the second unacceptable region. At least one parameter of an operating recipe for performing a process on the workpiece is determined based on the filtered uniformity profile.
Claims17
A method, comprising:
- measuring a characteristic of a workpiece at a plurality of locations;
- generating a uniformity profile based on the characteristic measurements;
- identifying at least one acceptable region of the workpiece based on the uniformity profile;
- identifying at least one unacceptable region of the workpiece based on the uniformity profile;
- filtering the uniformity profile to remove at least a portion of the characteristic measurements associated with the second unacceptable region;
- and
- determining at least one parameter of an operating recipe for performing a process on the workpiece based on the filtered uniformity profile.
A manufacturing system, comprising:
- a metrology tool configured to measure a characteristic of a workpiece at a plurality of locations;
- a uniformity monitor configured to generate a uniformity profile based on the characteristic measurements, identify at least one acceptable region of the workpiece based on the uniformity profile, identify at least one unacceptable region of the workpiece based on the uniformity profile, and filter the uniformity profile to remove at least a portion of the characteristic measurements associated with the second unacceptable region;
- and
- a process controller configured to determine at least one parameter of an operating recipe for performing a process on the workpiece based on the filtered uniformity profile.
A manufacturing system, comprising:
- means for measuring a characteristic of a workpiece at a plurality of locations;
- means for generating a uniformity profile based on the characteristic measurements;
- means for identifying at least one acceptable region of the workpiece based on the uniformity profile;
- means for identifying at least one unacceptable region of the workpiece based on the uniformity profile;
- means for filtering the uniformity profile to remove at least a portion of the characteristic measurements associated with the second unacceptable region;
- and
- means for determining at least one parameter of an operating recipe for performing a process on the workpiece based on the filtered uniformity profile.
Dependencies are inferred from the claim text.