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US 6,665,583 B2Granted
Article holders with sensors detecting a type of article held by the holder
AssigneeTru-Si Technologies, Inc.
InventorsFrank E. Kretz, Alexander J. Berger, Sean A. Casarotti
Life of this patent
Estimating the term…
Abstract
An article holder has sensors that detect whether an article held in the holder is a workpiece or a piece of packaging material. Examples are end effectors suitable for picking up semiconductor wafers and packaging material from a pod or some other carrier.
Claims10
An article handling method comprising:
- picking up an article by an article holder having one or more sensors;
- and
- having the one or more sensors generate one or more signal indicating whether the article is a workpiece or a piece of packaging material.
Dependencies are inferred from the claim text.