Method and system for managing semiconductor manufacturing equipment
AssigneeOki Electric Industry Co., Ltd.
InventorShunji Hayashi
Life of this patent
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Abstract
A management method capable of making an accurate decision about a malfunction of the semiconductor manufacturing equipment includes sampling a plurality of data of at least one parameter under normal operating conditions of the semiconductor manufacturing equipment; generating a Mahalanobis space A from a group of sampled data; calculating a Mahalanobis distance from measured values of the parameter under ordinary operating conditions of the semiconductor manufacturing equipment; and deciding that a malfunction occurred in the semiconductor manufacturing equipment the value of the Mahalanobis distance exceeds a predetermined value.
Claims12
A method of controlling semiconductor manufacturing equipment used to manufacture a semiconductor wafer, comprising:
- sampling a plurality of sample data of at least one parameter which represents a manufacturing condition for obtaining the semiconductor wafer, under a normal operating state of the semiconductor manufacturing equipment;
- generating a Mahalanobis space based on the plurality of sample data;
- calculating a Mahalanobis distance based on the Mahalanobis space and a group of operating data of the at least one parameter measured during an operating state of the semiconductor manufacturing equipment;
- and
- stopping operation of the semiconductor manufacturing equipment when the Mahalanobis distance exceeds a threshold value.
A method of controlling semiconductor manufacturing equipment used to manufacture a semiconductor wafer, comprising:
- sampling a plurality of sample data of at least one parameter which represents a manufacturing condition for obtaining the semiconductor wafer, under a normal operating state of the semiconductor manufacturing equipment;
- standardizing the plurality of sample data using a standardizing calculator, to provide a plurality of standardized sample values;
- measuring a group of operating data of the at least one parameter during an operating state of the semiconductor manufacturing equipment;
- standardizing the group of operating data using the standardizing calculator, to provide a group of standardized operating values;
- calculating a similarity value using a value calculator, based on the standardized sample values and the standardized operating values;
- and
- stopping operation of the semiconductor manufacturing equipment when the similarity value exceeds a threshold value.
Dependencies are inferred from the claim text.