US 6,665,372 B2Granted

X-ray diffractometer

AssigneeBruker AXS GmbH

InventorsDetlef Bahr, Norbert Kuhnmuench

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Abstract

An X-ray diffractometer comprising an X-ray source (10) from which X-rays are guided to a sample (11) to be investigated, an X-ray detector (12) for receiving X-rays diffracted or scattered from or reflected by the sample (11), and a goniometer for adjustment of sequential relative angular positions between the X-ray source (10), the sample (11) and the X-ray detector (12) for detecting X-ray diffraction lines, X-ray scattered signals or X-ray reflectograms of the sample (11) to be investigated, wherein the X-rays can be guided at least sectionally along different optical paths, is characterized in that the X-rays can be guided from a position 1 to a position 2 along n≧2 different switchable optical paths, wherein the different optical paths are rigidly disposed relative to each other between position 1 and position 2 and form a unit (13), wherein the sample (11) assumes either position 1 or position 2 and wherein the switching over between the different optical paths can be effected by turning the unit (13) relative to the sample (11) about the sample position. Due to its considerably more compact structure compared to conventional arrangements, the inventive arrangement requires considerably less space while maintaining full relative motion of the parts, wherein the arrangement permits omission of expensive components, in particular detectors and associated measurement electronics.

Claims13

Dependent claims

An X-ray diffractometer for investigation of a sample, the diffractometer having at least one section in which X-rays can be guided along different optical paths, the diffractometer comprising:

an X-ray source;
a sample location onto which X-rays from said source are directed;
an X-ray detector for receiving X-rays which are at least one of diffracted from, scattered from, and reflected by the sample at a selected detection angle;
a goniometer cooperating with said source, said sample location and said detector for changing said detection angle to adjust sequential relative angular positions between said source, the sample and said detector to detecting at least one of X-ray diffraction lines, X-ray scattered signals, and X-ray reflectograms of the sample;
an optical unit having n≧2 different, switchable optical paths for guiding X-rays from a first position to a second position downstream of said first position along a selected optical path, wherein said n≧2 different optical paths have fixed, unchanging positions relative to each other between said first and said second positions, wherein said sample location is disposed at one of said first position and said second positions;
means for turning said optical unit relative to the sample and about said sample location to cause X-rays at said detection angle to travel along a different one of said n≧2 optical paths;
and
means for preventing X-rays emanating from the sample at angles other than said detection angle from reaching said detector along a non-selected one of said n≧2 different optical paths.

5 more elements

Dependencies are inferred from the claim text.