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US 6,665,126 B2Granted
Projection exposure lens with aspheric elements
AssigneeCarl-Zeiss-Stiftung
InventorsDavid R. Shafer, Wilhelm Ulrich, Helmut Beierl
Life of this patent
Estimating the term…
Abstract
A projection exposure lens has an object plane, optical elements for separating beams, a concave mirror, an image plane, a first lens system arranged between the object plane and the optical elements for separating beams, a second double pass lens system arranged between the optical elements for separating beams and the concave mirror, a third lens system arranged between the optical elements for separating beams and the image plane. The second lens system has a maximum of five lenses.
Claims78
A projection exposure lens comprising:
- an object plane,
- an optical element for separating beams,
- a concave mirror,
- an image plane,
- a first lens system arranged between the object plane and the optical elements for separating beams,
- a second double passed lens system arranged between the optical elements for separating beams and the concave mirror,
- a third lens system arranged between the optical elements for separating beams and the image plane,
- wherein
- at least one of the lens or mirror surfaces of the first, second or third lens system is aspheric and the numerical aperture NA of the projection exposure lens is 0.7 or greater, with a maximum image height exceeding 10 mm.
6 more elements
A projection exposure lens comprising:
- an object plane,
- an optical element for separating beams,
- a concave mirror,
- an image plane,
- a first lens system arranged between the object plane and the optical elements for separating beams,
- a second double pass lens system arranged between the optical elements for separating beams and the concave mirror,
- a third lens system arranged between the optical elements for separating beams and the image plane,
- wherein
- the second lens system comprises a maximum of five lenses and two lenses are negative lenses.
6 more elements
A projection exposure lens comprising:
- an object plane,
- an optical element for separating beams,
- a concave mirror,
- an image plane,
- a first lens system arranged between the object plane and the optical elements for separating beams,
- a second double pass lens system arranged between the optical elements for separating beams and the concave mirror,
- a third lens system arranged between the optical elements for separating beams and the image plane,
- wherein
- the second lens system comprises a maximum of five lenses and wherein at least two lenses are negative lenses.
6 more elements
A projection exposure lens comprising:
- an object plane,
- optical elements for separating beams,
- a concave mirror,
- an image plane,
- a first lens system arranged between the object plane and the optical elements for separating beams,
- a second doable pass lens system arranged between the optical elements for separating beans and the concave mirror,
- a third lens system arranged between the optical elements for separating beams and the image plane,
- wherein the second lens system comprises a maximum of five lenses and the rms wavefront aberration is less than 20 milliwaves.
5 more elements
A projection exposure lens comprising:
- an object plane,
- optical elements for separating beams,
- a concave mirror,
- an image plane,
- a first lens system arranged between the object plane and the optical elements for separating beams,
- a second lens system arranged comprising a double pass lens system between the optical elements for separating beams and the concave mirror,
- a third lens system arranged between the optical elements for separating beams and the image plane,
- wherein the second lens system comprises a maximum of five lenses and the first lens system consists of one lens,
- wherein one lens of the first lens system is a positive lens,
- and, wherein the one lens of the first lens system has at least one aspheric surface.
7 more elements
A projection exposure lens comprising:
- an object plane,
- optical elements for separating beams,
- a concave mirror,
- an image plane,
- a first lens system arranged between the object plane and the optical elements for separating beams,
- a second lens system arranged comprising a double pass lens system between the optical elements for separating beams and the concave mirror,
- a third lens system arranged between the optical elements for separating beams and the image plane,
- wherein the second lens system comprises a maximum of five lenses and the first lens system consists of one lens, and
- wherein the optical elements for separating beams comprise two folding mirrors.
6 more elements
Dependencies are inferred from the claim text.