Illumination system and exposure apparatus and method
AssigneeNikon Corporation
InventorHideki Komatsuda
Life of this patent
Estimating the term…
Abstract
An exposure apparatus that exposes an image of a pattern of a mask onto a photosensitive substrate with EUV radiation, and includes a radiation source unit and an exposure apparatus body unit. The exposure apparatus body unit includes an optical integrator, a mirror arranged in an optical path between the radiation source unit and the optical integrator, a detector arranged in an optical path of the exposure apparatus body unit, and a controller which is connected to the detector and which controls an inclination of the mirror based on an output from the detector. In addition, the radiation source unit and the exposure apparatus body unit are installed independently.
Claims21
An exposure apparatus for exposing an image of a pattern of a mask onto a photosensitive substrate with EUV radiation, comprising:
- a radiation source unit;
- an exposure apparatus body unit including an optical integrator;
- and
- a mirror arranged in an optical path between the radiation source unit and the optical integrator;
- wherein the exposure apparatus body unit comprises:
- a detector arranged in an optical path of the exposure apparatus body unit;
- and
- a controller which is connected to the detector and which controls an inclination of the mirror based on an output from the detector so as to align optical axes of the radiation source unit and the exposure apparatus body unit;
- and
- wherein the radiation source unit and the exposure apparatus body unit are installed independently.
An exposure method for exposing an image of a pattern of a mask onto a photosensitive substrate with EUV radiation, comprising the steps of:
- supplying a radiation from a radiation source unit;
- guiding the radiation from the radiation source unit to a mirror;
- guiding the radiation reflected by the mirror toward an optical integrator included in an exposure apparatus body unit;
- detecting the radiation by a detector arranged in an optical path of the exposure apparatus body unit;
- and
- controlling an inclination of the mirror based on an output from the detector so as to align optical axes of the radiation source unit and the exposure apparatus body unit;
- wherein the radiation source unit and the exposure apparatus body unit are installed independently.
Dependencies are inferred from the claim text.