US 6,665,033 B2 · Method for forming alignment layer by ion beam surface modification

Method for forming alignment layer by ion beam surface modification

AssigneeInternational Business Machines Corporation

InventorsAlessandro C. Callegari, Praveen Chaudhari, Fuad E. Doany, James P. Doyle, Eileen A. Galligan, James H. Glownia, Gareth G. Hougham, James A. Lacey, Shui-Chih Lien, Minhua Lu, Alan E. Rosenbluth, Kei-Hsiung Yang

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Abstract

A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions and quenched with a reactive component to saturate dangling bonds on the surface.

Claims6

Dependent claims

A method for preparing an alignment layer surface, comprising the steps of:

providing a surface on the alignment layer;
bombarding the surface with ions of an ion beam;
and
introducing reactive gas to the ion beam to saturate dangling bonds on the surface, wherein the reactive gas is at least one of silane and tetrafluoromethane.

1 more element

Dependencies are inferred from the claim text.