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US 6,665,014 B1Granted
Microlens and photodetector
AssigneeIntel Corporation
InventorsAzar Assadi, Kannan Raj
Life of this patent
Estimating the term…
Abstract
An array of photosensitive devices may be formed with improved fill factors by including a diffractive microlens which may have a stepped configuration. The microlens may be formed of a sol-gel material having a photoinitiator, or other materials that may be defined with low temperature techniques commonly used in connection with photoresist. In particular, a gray scale mask may be used to define a plurality of steps in the resulting microlens which have different diffractive characteristics.
Claims16
A method comprising:
- forming a first photodefinable layer;
- forming a second photodefinable layer over said first photodefinable layer;
- defining said second photodefinable layer so that the first photodefinable layer extends beyond the second photodefinable layer, creating a stepped structure;
- and
- enabling said stepped structure to act as a diffractive microlens.
2 more elements
A structure comprising:
- a first photodefinable layer having a first length;
- a second photodefinable layer positioned over said first photodefinable layer and having a second length, said second length being shorter than said first length;
- and
- said first and second photodefinable layers to create a diffractive microlens.
1 more element
A diffractive microlens comprising:
- a distinct first layer having a first length;
- and
- a distinct second layer positioned over said first distinct layer having a second length, said second length being shorter than said first length, said first and second layers forming a diffractive microlens.
Dependencies are inferred from the claim text.