US 6,664,784 B1 · Magneto-resistive sensor with ZR base layer and method of fabricating the same

Abstract

There is provided a magneto-resistive sensor including (a) a multi-layered structure including a base layer, a magnetic layer, and a non-magnetic layer, the magnetic and non-magnetic layers being deposited on or above the base layer, the multi-layered structure having a sense region therein, and (b) a pair of electrode layers electrically connected to the sense region at its opposite sides, the electrode layers leading a sense current into the sense region at one side thereof and leading the sense current out of the sense region through the other side thereof, the magneto-resistive sensor detecting a magnetic field in accordance with fluctuation in a resistance in the sense region, the base layer being composed of zirconium (Zr) or alloy thereof. The magneto-resistive sensor makes it possible to provide a magneto-resistive layer having crystallinity superior to almost the same degree as crystallinity obtained when a base layer is composed of Ta, and to ensure a high resistance-change ratio.

Claims45

Dependent claims

A magneto-resistive sensor comprising:

(a) a multi-layered structure including a base layer, a magnetic layer, and a non-magnetic layer, said magnetic and non-magnetic layers being deposited on or above said base layer, said multi-layered structure having a sense region therein;
and
(b) a pair of electrode layers electrically connected to said sense region at its opposite sides, said electrode layers leading a sense current into said sense region at one side thereof and leading said sense current out of said sense region through the other side thereof,
said magneto-resistive sensor detecting a magnetic field in accordance with fluctuation in a resistance in said sense region,
said base layer being composed of zirconium (Zr) or alloy thereof,
wherein a mirror reflectivity of said base layer at a surface of said base layer that-abuts said magnetic layer is equal to or greater than 0.1.

3 more elements

A magneto-resistive sensor comprising:

(a) a substrate;
(b) a lower shield layer formed on said substrate;
(c) a lower gap layer formed on said lower shield layer and composed of electrically insulating material;
(d) a magneto-resistive element formed on said lower gap layer;
(e) an insulating layer formed on said magneto-resistive element;
(f) a pair of magnetization-bias layers formed at opposite sides of said magneto-resistive element;
(g) an upper gap layer formed over said magneto-resistive element and said magnetization-bias layers;
and
(h) an upper shield layer formed on said upper gap layer, said magneto-resistive element comprising:
(d1) a multi-layered structure including a base layer, a magnetic layer, and a non-magnetic layer, said magnetic and non-magnetic layers being deposited on or above said base layer, said multi-layered structure having a sense region therein, said magnetization-bias layers making electrical contact with said magnetic layer, said base layer being composed of zirconium (Zr) or alloy thereof;
and
(d2) a pair of electrode layers electrically connected to said sense region at its opposite sides, said electrode layers leading a sense current into said sense region at one side thereof and leading said sense current out of said sense region through the other side thereof, each of said electrode layers being formed on each of said magnetization-bias layers.

9 more elements

An apparatus for magnetically reproducing data, comprising:

(a) a magneto-resistive sensor which reads data out of a medium magnetically storing data therein;
(b) a head magnetically recording data into said medium, and formed on said magneto-resistive sensor;
(c) a slider sliding on said medium, said magneto-resistive sensor and said head being fixed to said slider;
and
(d) a device moving said slider to thereby position said magneto-resistive sensor and said head at a predetermined region on said medium, said magneto-resistive sensor comprising:
(a1) a multi-layered structure including a base layer, a magnetic layer, and a non-magnetic layer, said magnetic and non-magnetic layers being deposited on or above said base layer, said multi-layered structure having a sense region therein;
and
(a2) a pair of electrode layers electrically connected to said sense region at its opposite sides, said electrode layers leading a sense current into said sense region at one side thereof and leading said sense current out of said sense region through the other side thereof,
said magneto-resistive sensor detecting a magnetic field in accordance with fluctuation in a resistance in said sense region,
said base layer being composed of zirconium (Zr) or alloy thereof,
wherein a mirror reflectivity of said base layer at a surface of said base layer that abuts said magnetic layer is equal to or greater than 0.1.

8 more elements

Dependencies are inferred from the claim text.

Magneto-resistive sensor with ZR base layer and method of fabricating the same

Life of this patent

Magneto-resistive sensor with ZR base layer and method of fabricating the same

Life of this patent

Abstract

Claims45