Method and apparatus for specimen fabrication

A sample fabricating apparatus, comprising:

• at least a focused ion beam irradiating optical system, a secondary particle detector for detecting secondary particles generated from a sample irradiated with a focused ion beam, and a specimen stage on which a specimen base is placed, for separating a micro sample from said specimen base or preparing the micro sample to be separated by irradiating a peripheral area of the micro sample with the focused ion beam in a plurality of incident directions to said specimen base, wherein said focused ion beam irradiating optical system is provided with a focused ion beam tilting function of changing an optical axis of the focused ion beam emitted to the sample by at least 15 degrees, wherein said focused ion beam tilting function of changing the optical axis of the focused ion beam emitted to the sample by at least 15 degrees is realized by an electric deflecting mechanism.