Magnetic immersion lense with detection arrangement
AssigneeShimadzu Research Laboratory (Europe) Ltd.
InventorsTakao Marui, Ranjan Krishnachandra Badheka, Frank Henry Read
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Abstract
A magnetic immersion lens has inner and outer pole-pieces arranged symmetrically about a longitudinal axis X-X of the lens, the inner pole piece having a through-bore and the lens producing a magnetic imaging field for directing along the through-bore secondary electrons emitted from a specimen positioned in front of the inner pole-piece. The lens has an axially-symmetric detection arrangement located within the through-bore. The detector comprises a focusser electrode, a repeller electrode, an extractor electrode, a detector electrode, and a reflector electrode
Claims19
A magnetic immersion lens comprising inner and outer pole-pieces arranged symmetrically about a longitudinal axis of the lens, the inner pole-piece having a through-bore and the lens producing a magnetic imaging field for directing, along said through-bore, charged particles emitted from a specimen positioned in front of the inner pole-piece, and an axially-symmetric charged-particle detection arrangement located within the through-bore for detecting charged particles being directed along the through-bore by the magnetic imaging field, the charged-particle detection arrangement comprising repeller means for deflecting said charged particles away from the longitudinal axis and detector means for detecting charged particles deflected by the repeller means.
Dependencies are inferred from the claim text.