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AssigneeLeica Microsystems Heidelberg GmbH
InventorsJohann Engelhardt, Juergen Hoffmann
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A scanning microscope, in particular a confocal scanning microscope, with a light source (1), preferably a laser, for generating an illumination light beam (14) for a sample (11) and a scanning device for deflecting the illumination light beam (14) is, with a view to fast and reliable image-data acquisition and a compact structure, configured and refined in such a way that the scanning device has at least one micromirror (16). An optical arrangement with a light source (1), preferably a laser, for generating a light beam and at least one micromirror (16) for deflecting the light beam is furthermore provided, in which an adaptive lens (22) is provided for correcting for mirror defects or deformation of the mirror surface. Lastly, a method for imaging in scanning microscopy, in particular in confocal scanning microscopy, with a light source (1), preferably a laser, for generating an illumination light beam (14) for a sample (11) and a scanning device for deflecting the illumination light beam (14) is provided, in which at least one micromirror (16) is used in the scope of the scanning device.
A confocal scanning microscope, comprising:
A confocal scanning microscope, comprising a laser defining a light source for generating an illumination light beam, a scanning device for deflecting the illumination light beam across a sample, wherein the scanning device has at least one micromirror which is moveable in at least two directions, means for simultaneous detection of the setting or position of the at least one micromirror, and an adaptive lens for correcting micromirror defects or deformation of the micromirror surface, wherein the adaptive lens is associated with a sensor.
A method for imaging in confocal scanning microscopy, comprising the steps of:
Dependencies are inferred from the claim text.