US 6,664,524 B2Granted

Focusing method

AssigneeNEC Corporation

InventorsYukio Ogura, Hideyuki Moribe, Yukio Morishige

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Abstract

The present focusing method is used in a focus detecting apparatus comprising an objective lens, means for entering a luminous flux for focus detection into a target object from a position inconsistent with an optical axis of the objective lens through at least the objective lens, a condenser lens for converging the luminous flux after it is reflected by the target object and again passes through the objective lens, two two-division sensors disposed with the same optical inclination in front of and behind a position where the reflected luminous flux is converged by the condenser lens when a focus of the objective lens is adjusted to the surface of the target object, and a signal processing circuit for performing operational processing of signals from the two two-division sensors. The focus detecting apparatus detects whether the focus of the objective lens is adjusted to the surface of the target object. When focusing is performed with this apparatus, the target object is moved while the focus position is followed after the detection of the focus position, focus detection is performed many times and the detected signal values are averaged, and the resultant average value is used to drive the objective lens. This series of operations is repeated, and then the focus position is fixed.

Claims11

Dependent claims

an autofocus step of driving said objective lens with respect to said target object in rest and stopping said objective lens at a position where a processed signal corresponding to the luminous flux reflected by said target object after repassing through said objective lens of said signal processing circuit presents a value indicating a focus position;
and
a focus lock step of repeating a series of operations while said target object is moved, the series of operations including detection of processed signals of said signal processing circuit over a number of times, averaging of the detected signals, and drive of said objective lens such that the resultant average value matches a processed signal of said signal processing circuit to update the focus position, and then fixing the focus position.

A method of focusing for use in a focus detecting apparatus comprising an objective lens, means for entering a luminous flux for focus detection into a target object from a position inconsistent with an optical axis of said objective lens through at least said objective lens, a beam splitter for branching the luminous flux to two directions after it is reflected by said target object and again passes through said objective lens, a first condenser lens for converging one of the luminous flux branched by said beam splitter, a second condenser lens for converging the other luminous flux branched by said beam splitter, a first two-division sensor disposed in front of a position where the one luminous flux branched by said beam splitter is converged by said first condenser lens when a focus position of said objective lens is adjusted to the surface of said target object, a second two-division sensor disposed with the same optical inclination as that of said first two-division sensor behind a position where the other luminous flux branched by said beam splitter is converged by said second condenser lens when the focus position of said objective lens is adjusted to the surface of said target object, and a signal processing circuit for performing operational processing of signals from said two-division sensors, the method comprising the steps of:

an autofocus step of driving said objective lens with respect to said target object in rest and stopping said object lens at a position where a processed signal of said signal processing circuit presents a value indicating a focus position;
and
a focus lock step of repeating a series of operations over a plurality of times while said target object is moved, the series of operations including detection of processed signals of said signal processing circuit over a number of times, averaging of the detected signals, and drive of said objective lens such that the resultant average value matches a processed signal of said signal processing circuit to update the focus position, and then fixing the focus position.

Dependencies are inferred from the claim text.