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US 6,664,502 B1Granted
Workpiece holder with multiple recesses to further support workpiece in parallel laser drilling
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorXinbing Liu
Life of this patent
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Abstract
An improved workpiece holder is provided for use in a laser drilling system. The workpiece holder includes: a body having at least one planar support surface adapted to support a workpiece; a plurality of recesses formed in the planar support surface; at least one groove formed in the planar support surface; and a vacuum passage extending through the body of the holder. In addition, the plurality of recesses may be configured to align with the drilling pattern of the laser drilling system.
Claims16
A workpiece holder for use in a laser drilling system, comprising:
- a body having at least one planar support surface adapted to support a workpiece;
- a plurality of recesses formed in the planar support surface;
- a plurality of intermediate support surfaces defined between the plurality of recesses and providing additional support for the workpiece;
- at least one groove formed in the planar support surface, the groove being disposed outside of the plurality of recesses and within a periphery of the planar support surface;
- and
- a vacuum passage extending through the body of the holder.
3 more elements
A laser drilling system, comprising:
- a laser subsystem operable to project a laser beam onto an exposed surface of a substantially planar workpiece;
- workpiece holder being adapted to support the workpiece on a planar support surface thereof, the planar surface having a plurality of recesses formed therein and extending through the workpiece holder;
- and
- a means for securing the workpiece to the planar support surface of the workpiece holder, such that the workpiece extends across the plurality of recesses formed in the workpiece holder,
- wherein a plurality of intermediate support surfaces are defined between the plurality of recesses, thereby providing additional support for the workpiece.
2 more elements
Dependencies are inferred from the claim text.