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US 6,664,200 B1Granted
Method of manufacturing a semiconductor component and polyimide etchant therefor
OwnerEdward R. Prack, Frank W. Fischer +1inventors
InventorsEdward R. Prack, Frank W. Fischer, Treliant Fang
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Abstract
A method of manufacturing a semiconductor component having a layer (240, 340) comprised of polyimide includes using an etchant that is at least partially composed of aminopropanediol to etch the layer comprised of polyimide. The etchant can also include a solvent, a diluent, and water.
Claims30
A method of manufacturing a semiconductor component comprising:
- providing a composite substrate comprised of a semiconductor substrate and a layer comprised of polyimide;
- heating aminopropanediol;
- and
- applying the heated aminopropanediol to the layer comprised of polyimide.
1 more element
A method of manufacturing a semiconductor component comprising:
- providing a composite substrate comprised of a semiconductor substrate and a layer comprised of polyimide;
- and
- applying aminopropanediol to the layer comprised of polyimide, wherein:
- applying the aminopropanediol further comprises applying a mixture comprised of a solvent and the aminopropanediol to the layer;
- and
- applying the mixture further comprises providing the solvent from the group consisting of pyrrolidone and piperidone.
3 more elements
A method of manufacturing a semiconductor component comprising:
- providing a semiconductor substrate;
- manufacturing a plurality of semiconductor devices in the semiconductor substrate;
- forming an interconnect layer over the semiconductor substrate and the plurality of semiconductor devices;
- coating a first layer comprised of polyimide over the interconnect layer;
- patterning the first layer;
- providing a solvent from the group consisting of pyrrolidone and piperidone;
- applying a mixture comprised of aminopropanediol, the solvent, a diluent, and water to the first layer to remove at least a portion of the first layer;
- and
- coating a second layer comprised of polyimide over the interconnect layer after applying the mixture.
6 more elements
Dependencies are inferred from the claim text.