Coating liquid for forming a silica group coating film having a small dielectric constant
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsYasushi Fujii, Atsushi Matsushita
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Abstract
A coating liquid for forming a silica group coating film having a dielectric constant equal to or less than 3.2, comprises a condensation product which is obtained through hydrolysis of trialkoxysilane within an organic solvent under an acid catalysis; and at least one of polyalkylene glycol and the end alkylation product thereof. The addition amount of the at least one of polyalkylene glycol and the end alkylation product thereof is 10-500 weight % with respect to the solid component of the coating liquid, and the weight-average molecular weight of the polyalkylene glycol and the end alkylation product thereof is 100-10,000.
Claims7
A coating liquid for forming a silica group coating film having a dielectric constant equal to or less than 3.2, comprising:
- a condensation product which is obtained through hydrolysis of trialkoxysilane within an organic solvent under an acid catalysis;
- and
- at least one of polyalkylene glycol and the end alkylation product thereof.
Dependencies are inferred from the claim text.