System for and method of constructing an alternating phase-shifting mask
AssigneeAdvanced Micro Devices, Inc.
InventorsKouros Ghandehari, Bruno LaFontaine, Bhanwar Singh
Life of this patent
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Abstract
An exemplary method of constructing an alternating phase-shifting mask is described. This method can include providing a vapor in a vapor chamber containing a mask blank, and applying a laser to selected areas of the mask blank to deposit material on the integrated circuit substrate. The material is configured to cause a 180° phase shift at the wavelengths the mask is designed for such as 248 nm, 193 nm or 157 nm.
Claims20
A method of constructing an alternating phase-shifting mask, the method comprising:
- providing a vapor in a vapor chamber containing a mask blank substrate;
- and
- applying a laser or other light source to selected areas of the mask blank substrate to deposit material at the selected areas on the mask blank substrate near mask features with the deposited material thickness being configured to cause a 180° phase shift at a wavelength the mask is designed for.
A system for forming an alternating phase-shifting mask, the system comprising:
- a vapor chamber;
- means for dispensing a chemical vapor in the vapor chamber;
- and
- means for providing radiation to a portion of a mask blank substrate to selectively deposit a material at radiated portions of the substrate, the material being configured to cause a 180° phase shift from portions of features of the mask used as an alternating phase-shifting mask.
A method of material deposition in the formation of an alternating phase-shifting mask, the method comprising:
- providing a chemical vapor in a vapor chamber containing a mask blank substrate;
- and
- selectively growing a material on the integrated circuit substrate by photon assisted chemical vapor deposition (CVD) at radiated locations on the substrate until the material achieves a thickness necessary at a wavelength of use to induce a 180 degree phase shift.
Dependencies are inferred from the claim text.