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AssigneeSeiko Epson Corporation
InventorsTakashi Inoue, Takeyoshi Ushiki, Takumi Seki, Makoto Ue, Fumikazu Mizutani, Sachie Takeuchi
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A non-aqueous electrolyte comprises an organic solvent and a solute, and also has an electrolytic conductivity that is greater than or equal to 1 mS/cm but less than or equal to 100 mS/cm. This solute preferably includes at least one of a carboxylate and a salt of inorganic oxoacid. In addition, the non-aqueous electrolyte preferably comprises water in a proportion of 1 to 10 wt %. In an MIM nonlinear element (20), an insulated film (24) is formed by anodic oxidation using the above non-aqueous electrolyte. In addition, the insulated film comprises at least one of carbon atoms and atoms of families 3 to 7 that were originally the central atoms of the salt of inorganic oxoacid, and has a relative permittivity of 10 to 25. With this MIM nonlinear element, the capacitance is sufficiently small, the steepness of the voltage-current characteristic is sufficiently large, and also the resistance is sufficiently uniform over a wide area.
A method of using an electrolyte for fabricating a two-terminal nonlinear element comprising a first conductive film, an insulated film and a second conductive film, wherein said electrolyte comprises an organic solvent, water in a proportion of 1 to 10 wt % and a solute and has electrolytic conductivity being greater than or equal to 1 mS/cm but less than or equal to 100 mS/cm, said first conductive film is of tantalum or a tantalum alloy, and said insulated film has a relative permittivity of 10 to 25, comprising the step of:
Dependencies are inferred from the claim text.