Crystal puller and method for growing monocrystalline silicon ingots
AssigneeMEMC Electronic Materials, Inc.
InventorsZheng Lu, Mohsen Banan, Ying Tao, Lee Ferry, Carl F. Cherko
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AssigneeMEMC Electronic Materials, Inc.
InventorsZheng Lu, Mohsen Banan, Ying Tao, Lee Ferry, Carl F. Cherko
Estimating the term…
A crystal puller and method for growing monocrystalline silicon ingots includes first and second electrical resistance heaters in the crystal puller in longitudinal, closely spaced relationship with each other to radiate heat toward the ingot as the ingot is pulled upward within the housing. In one embodiment, the first heater is powered when the ingot is pulled upward to a first axial position above the surface of the molten silicon and the second heater is powered when the ingot is pulled upward to a second axial position above the first axial position. In another embodiment the first and second heaters are powered until the ingot is separated from the molten silicon and then the heating power output of the first and second heaters is reduced to substantially increase the cooling rate at which the ingot is cooled. An adapter mounting the heaters may also be provided for adapting existing crystal pullers to incorporate the heaters.
A method of growing a monocrystalline silicon ingot in a crystal puller of the type used for growing monocrystalline silicon ingots according to the Czochralski method, the crystal puller having a housing, a crucible in the housing for containing molten silicon and a pulling mechanism for pulling an ingot upward from the molten silicon within the housing, the method comprising the steps of:
A method of growing a monocrystalline silicon ingot in a crystal puller of the type used for growing monocrystalline silicon ingots according to the Czochralski method, the crystal puller having a housing, a crucible in the housing for containing molten silicon and a pulling mechanism for pulling an ingot upward from the molten silicon within the housing, the method comprising the steps of:
Dependencies are inferred from the claim text.