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US 6,663,466 B2Granted
Carrier head with a substrate detector
AssigneeApplied Materials, Inc.
InventorsHung Chih Chen, Ming Kuei Tseng, Steven Zuniga
Life of this patent
Estimating the term…
Abstract
A carrier head has a base, a flexible membrane, and a valve in the carrier head that forms part of a substrate detection system. The valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.
Claims19
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower surface that provides a substrate receiving surface;
- and
- a valve in the carrier head that forms part of a substrate detection system, wherein the valve includes a movable structure that contacts an upper surface of the flexible membrane, and wherein the valve and flexible membrane are configured so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the movable structure is actuated to generate a signal to the substrate detection system.
1 more element
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower surface that provides a substrate receiving surface;
- and
- a valve in the carrier head that forms part of a substrate detection system, wherein the valve includes a valve stem that contacts an upper surface of the flexible membrane, and wherein the valve and flexible membrane are configured so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system;
- wherein the valve is biased by a spring, and the spring constant of the spring is selected so that the force from the spring is sufficient to counteract a force from a flexible membrane when the substrate is not attached, but is insufficient to counteract a force from a flexible membrane when the substrate is attached.
2 more elements
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower surface that provides a substrate receiving surface;
- and
- a valve in the carrier head that forms part of a substrate detection system, wherein the valve includes a movable structure that projects past a support surface, and wherein the valve and flexible membrane are configured so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the substrate abuts the support surface and actuates the valve.
1 more element
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower surface that provides a substrate receiving surface;
- and
- a plurality of valves in the carrier head that form part of a substrate detection system, wherein any of the valves may be actuated to generate a signal to the substrate detection system.
1 more element
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower surface that provides a substrate receiving surface;
- and
- a plurality of valves in the carrier head that form part of a substrate detection system, wherein all of the valves must be actuated to generate a signal to the substrate detection system.
1 more element
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower surface that provides a substrate receiving surface;
- a second chamber;
- a passage through the base between the first and second chambers;
- a first valve that is biased open and actuates to close the passage if the first chamber is evacuated when a substrate is attached to the flexible membrane;
- and
- a second valve connected in series with the first valve, the second valve biased closed and actuatable to open the passage if the second chamber is evacuated.
4 more elements
A carrier head, comprising:
- a base;
- a flexible membrane that defines a first chamber and has a lower surface that provides a substrate receiving surface;
- and
- a first movable structure that forms part of a substrate detection system, wherein the first movable structure contacts an upper surface of the flexible membrane and is configured so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the first movable structure is actuated.
1 more element
Dependencies are inferred from the claim text.