Micro liquid dispenser incorporating a liquid pillar injector and method for operating

Abstract

A micro liquid dispenser that incorporates a liquid pillar injector and a method for depositing liquid on a substrate by the micro liquid dispenser are disclosed. The micro liquid dispenser is constructed by a liquid storage chamber, a micro-actuator and an aperture formed in a semiconductor substrate, such as a silicon substrate. The method for depositing liquid on the substrate can be carried out by positioning a substrate juxtaposed to the aperture of the micro liquid dispenser and then actuating the actuator of the dispenser to inject a liquid pillar from the aperture toward the substrate. Only a tip portion of liquid pillar contacts and thereby attaches to the surface of the substrate while the remaining portion of the liquid pillar breaks off and retracted into the aperture or the liquid storage chamber of the dispenser.

Dependencies are inferred from the claim text.