Holding apparatus
AssigneeAdvantest Corporation
InventorsToshio Kashiwazaki, Noriyuki Igarashi, Haruki Nakajima
Life of this patent
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Abstract
A device holding apparatus comprising a base plate; a hollow pad guard provided on the base plate; a pad pin inserted to the pad guard movably in an axis direction and having a through hole; a pad provided at a tip of the pad pin and having a through hole connected to the through hole of the pad pin; and a bellows pad provided on the base plate, having a through hole connected to the through hole of the pad pin and being elastic in the axis direction; for holding by suction a device by the pad by applying a negative pressure to the through hole of the bellows pad, the through hole of the pad pin and the through hole of the pad.
Claims8
A device holding apparatus, comprising:
- a base plate comprised of a conductive material;
- a hollow pad guard provided on said base plate;
- a pad pin comprise of a conductive material and inserted to said pad guard movable in an axis direction and having a through hole;
- a pad comprised of conductive material and provided at a tip of said pad pin and having a through hole connected to the through hole of the pad pin;
- and
- an elastic body provided between said base plate and said pad pin for giving to said pad pin a force in its tip direction;
- and
- a sealing body for forming an airtight chamber on a base end side of said pad pin;
- for holding by suction a device by said pad by applying a negative pressure to said airtight chamber, the through hole of said pad pin and the t rough hole of said pad.
Dependencies are inferred from the claim text.