Microvalve

A microvalve comprising:

• a duct layer having an input flow opening communicating with an input flow duct and at least one output flow opening communicating with an output flow duct;
• and
• a plate-like valve member having a first surface and a second surface opposite said first surface, said first surface, together with said duct layer, defining a first chamber therebetween and said second surface defining a second chamber, said first chamber communicating with said input flow opening and said output flow opening of said duct layer, and wherein said valve member is able to be shifted between a closed position closing the input flow opening and an open position opening the input flow opening and thus rendering possible transfer of fluid from the input flow duct to the output flow duct through the first chamber, said valve member further including a first recess opposite the output flow opening and a second recess adjacently spaced from said first recess, said first and second recesses providing fluid communication through the valve member between the first and the second chamber for relieving fluid pressure in said first chamber while reducing the pressure forces acting on said valve member when said valve member is in said open position, and in that the switching operations are caused by electrostatic switching forces acting on the valve member,
• wherein the output flow opening and the input flow opening comprise slots formed in the duct layer and wherein the first recess and the second recess comprise slots formed in the valve member and wherein said first recess is substantially aligned with said output flow opening regardless of the position of said valve member and said second recess is not in alignment with either said input flow opening or said output flow opening.