Linear motion apparatus and associated method
AssigneeApplied Materials, Inc.
InventorDonald J. K. Olgado
Life of this patent
Estimating the term…
Abstract
A guide apparatus comprising a plurality of guide linkages. Each one of the plurality of guide linkages comprises a pair of linkage members, each pair of the linkage members are rotatably connected about a guide pivot axis. The guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages. In one aspect, each guide linkage is arranged between a robot platform or a cassette and a base such that extending each of the plurality of guide linkages acts to linearly displace the robot platform relative to the base while limiting tilting of the robot platform or the cassette. In another aspect a robot can extend its end effectors while limiting tilting of the end effectors.
Claims31
A guide apparatus comprising a plurality of guide linkages, each one of the plurality of guide linkages comprises a pair of linkage members, each pair of the linkage members are rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages.
A guide apparatus comprising:
- a plurality of guide linkages, wherein each one of the plurality of guide linkages comprises a pair of linkage members, wherein each pair of linkage members is rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages, wherein the plurality of guide linkages comprises a first guide linkage, a second guide linkage, and a third guide linkage, wherein the guide pivot axis of the first guide linkage, the second guide linkage, and the third guide linkage are each spaced from each other, within the instantaneous linkage-plane, by angles of 120 degrees;
- and
- a robot device that is capable of robot motions within an instantaneous robot plane, wherein each guide pivot axis is located in an instantaneous linkage plane that extends substantially parallel to the instantaneous robot plane.
A guide apparatus comprising:
- a plurality of guide linkages, wherein each one of the plurality of guide linkages comprises a pair of linkage members, wherein each pair of linkage members is rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages, wherein the plurality of guide linkages comprises a first guide linkage, a second guide linkage, a third guide linkage, and a fourth guide linkage, wherein the guide pivot axis of the first guide linkage, the second guide linkage, the third guide linkage, and the fourth guide linkage are each spaced from each other, within the instantaneous linkage plane, by angles of 90 degrees;
- and
- a robot device that is capable of robot motions within an instantaneous robot plane, wherein each guide pivot axis is located in an instantaneous linkage plane that extends substantially parallel to the instantaneous robot plane.
A guide apparatus comprising:
- a plurality of guide linkages, wherein each one of the plurality of guide linkages comprises a pair of linkage members, wherein each pair of linkage members is rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages, wherein the plurality of guide linkages comprises N guide linkage, wherein the guide pivot axis of each one of the N guide linkages are each spaced from each other, within the instantaneous linkage plane, by angles of 360/N degrees;
- and
- a robot device that is capable of robot motions within an instantaneous robot plane, wherein each guide pivot axis is located in an instantaneous linkage plane that extends substantially parallel to the instantaneous robot plane.
A guide apparatus comprising a plurality of guide linkages, wherein each one of the plurality of guide linkages comprises a pair of linkage members, wherein each pair of linkage members is rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages, wherein at least one of the plurality of guide linkages is a rotary guide linkage.
A guide apparatus comprising:
- a plurality of guide linkages, wherein each one of the plurality of guide linkages comprises a pair of linkage members, wherein each pair of linkage members is rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages, wherein a robot is rotationally mounted to the robot platform having an instantaneous robot plane.
A robot lift comprising:
- a plurality of guide linkages, wherein each one of the plurality of guide linkages comprises a pair of linkage members, wherein each pair of linkage members is rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages.
A cassette lift comprising:
- a plurality of guide linkages, wherein each one of the plurality of guide linkages comprises a pair of linkage members, wherein each pair of linkage members is rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages.
A robot extension device comprising:
- a plurality of guide linkages, wherein each one of the plurality of guide linkages comprises a pair of linkage members, wherein each pair of linkage members is rotatably connected about a guide pivot axis, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages.
A guide apparatus comprising:
- a robot platform having an instantaneous robot plane;
- and
- a plurality of guide linkages, each one of the plurality of guide linkages comprises a pair of linkage members, each pair of the linkage members are rotatably connected about a guide pivot axis, each guide pivot axis is located in an instantaneous linkage plane that extends substantially parallel to the instantaneous robot plane, wherein the guide pivot axis of each guide linkage is arranged in a direction opposed to the direction of the guide pivot axis of the remainder of the guide linkages.
A method of assembling a plurality of guide linkages, each of the guide linkages comprising a pair of linkage members rotatably connected about a guide pivot axis, the method comprising:
- mounting each guide pivot axis of each guide linkage in a direction that is opposed to the direction of the guide pivot axis of the remainder of the guide linkages.
Dependencies are inferred from the claim text.