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US 6,662,663 B2Granted
Pressure sensor with two membranes forming a capacitor
AssigneeHewlett-Packard Development Company, L.P.
InventorChien-Hua Chen
Life of this patent
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Abstract
A pressure sensor may include a first membrane that flexes in response to pressure, a reference cavity covered by the first membrane where the reference cavity contains a vacuum and a second membrane, adjacent to the first membrane, the first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of the first membrane and the pressure.
Claims4
A pressure sensor comprising:
- a first membrane that flexes in response to pressure;
- a reference cavity covered by said first membrane, said reference cavity containing a vacuum;
- and
- a second membrane adjacent to said first membrane and not within said reference cavity, said first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure;
- wherein said first and second membranes are formed in a silicon substrate;
- and
- further comprising a polysilicon anchor on both edges of said first membrane securing said first membrane in said silicon substrate.
4 more elements
A pressure sensor comprising:
- a first membrane that flexes in response to pressure;
- a reference cavity covered by said first membrane, said reference cavity containing a vacuum;
- and
- a second membrane adjacent to said first membrane and not within said reference cavity, said first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure;
- wherein said first membrane has a curvature that curves toward said second membrane.
2 more elements
A pressure sensor comprising:
- a first membrane that flexes in response to pressure;
- a reference cavity covered by said first membrane, said reference cavity containing a vacuum;
- and
- a second membrane adjacent to said first membrane and not within said reference cavity, said first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure;
- wherein said first membrane has a curvature that curves away from said second membrane.
2 more elements
A pressure senior comprising:
- a first membrane that flexes in response to pressure;
- a reference cavity covered by said first membrane, said reference cavity containing a vacuum;
- a second membrane adjacent to said first membrane and not within said reference cavity, said first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of said first membrane and said pressure;
- an upper substrate;
- and
- a lower substrate;
- wherein said first and second membranes are supported between and bonded to said upper and lower substrates;
- and
- wherein opposite edges of each of said first and second membranes are bonded respectively to said upper and lower substrates.
6 more elements
Dependencies are inferred from the claim text.