Back to results
US 6,662,657 B2Granted
Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers
AssigneeHoneywell International Inc.
InventorsRand H. Hulsing, II, Randy Sprague
Life of this patent
Estimating the term…
Abstract
Performance-enhancing, reduced-area metalization adhesion areas in force-sensing transducers are described.
Claims12
A Coriolis rate sensor comprising:
- a substrate having a vibratable assembly connected therewith, the vibratable assembly comprising two force-sensing elements interconnected for being dithered 180 degrees out of phase;
- an adhesion layer intermittently disposed over and in contact with less than an entirety of each of the force-sensing elements;
- and
- a conductive path disposed over each of the force-sensing elements and intermittently fixedly bonded therewith through the adhesion layer.
1 more element
A Coriolis rate sensor comprising:
- a substrate;
- a first accelerometer having a proof mass and a first force-sensing element and being connected to the substrate by a first pair of flexures;
- a second accelerometer having a proof mass and a second force-sensing element and being connected to the proof mass to substrate by a second pair of flexures;
- interconnecting means interconnected between the first and second accelerometers for permitting the first accelerometer to be dithered 180 degrees out of phase with the second accelerometer;
- a metal adhesion layer disposed in intermittent portions over of each of the force-sensing elements;
- and
- an electrically conductive material disposed over each of the force-sensing elements and intermittently fixedly bonded therewith through the metal adhesion layer.
4 more elements
Dependencies are inferred from the claim text.