Net zero isolator

A suspension member, comprising:

• a means for coupling the suspension member to a frame external to the suspension member;
• a means for suspending a device that is to be isolated for stresses experienced by the external frame;
• and
• a means for reacting to a displacement of the frame coupling means, the displacement reacting means interconnecting the frame coupling means and the device suspending means such that a displacement of the frame coupling means is cancelled at the device suspending means by a reaction within the displacement reacting means.

A two-axis suspension system, comprising:

• a first pair of generally planar net zero isolators each having an elongated displacement reaction member floating between a pair of crosswise counter rotation members, the counter rotation members each having a mounting portion extended on a first side of the displacement reaction member and a isolated portion extended on a second side of the displacement reaction member, the linear displacement member and the pair of net zero isolators being structured such that a substantially linear displacement applied to the mounting portions and directed generally along the elongated displacement reaction member in the plane of the net zero isolator generates moments that rotate the counter rotation members to cancel the in-plane linear displacement of the mounting portions at the respective isolated portion, the first pair of net zero isolators spaced apart in a plane with the isolated portions arranged between them and the mounting portions arranged outside them;
• and
• a second pair of generally planar net zero isolators each being substantially similar to the first pair and being similarly arranged crosswise to the first pair, the mounting portions at respective first ends of the first pair being coupled to the isolated portions at respective first ends of the second pair, and the mounting portions at respective second ends of the first pair being coupled to the isolated portions at respective second ends of the second pair.

A method of suspending a device, the method comprising:

• suspending a plurality of suspension members to a surface external to the suspension members, each of the suspension members further comprising a respective plurality of mounting portions and isolated portions, wherein suspending the suspension members further comprises:
• interconnecting the mounting portions to a surface external to the suspension members, and
• suspending the isolated portions from the mounting portions;
• suspending a device from the isolated portions;
• and
• acting through a moment arm to generate a displacement within each suspension member that cancels a linear displacement of the mounting portions at the isolated portions.

An accelerometer comprising:

• an outer frame member formed of a monocrystalline silicon substrate having essentially parallel opposing surfaces;
• an acceleration sensing mechanism positioned within the outer frame member;
• and
• a plurality of net zero isolators suspending the acceleration sensing mechanism from the outer frame member, each of the net zero isolators comprising:
• a pair of spaced apart counter rotation members each including a mounting portion positioned on a first end and coupled to the outer frame member, and an isolated portion positioned on a second end and coupled to the acceleration sensing mechanism, and
• a displacement reaction member arranged between the pair of spaced apart counter rotation members, the pair of spaced apart counter rotation members being arranged crosswise to the displacement reaction member and having the mounting portions projected on a first side of the displacement reaction member toward the outer frame member and the isolated portions projected on a second side thereof toward the acceleration sensing mechanism, wherein the displacement reaction member and the interconnected pair of spaced apart counter rotation members are structured such that a linear displacement applied to the mounting portions in alignment with the displacement reaction member is balanced at the isolated portions.

A monolithic micro-machined accelerometer having improved shock survivability and external stress de-coupling characteristics, the accelerometer comprising:

• a) an accelerometer mechanism die formed of a first monocrystalline silicon substrate having essentially parallel opposing surfaces, the mechanism die comprising:
• i) an integral outer frame member,
• ii) an integral acceleration sensing mechanism disposed within said outer frame member, and
• iii) a plurality of integral net zero isolators pliantly suspending the acceleration sensing mechanism from the outer frame member, each of the integral net zero isolators comprising a pair of counter rotation members having a mounting pad adjacent to a first end and coupled to the outer frame member and having an isolated pad adjacent to a second end and coupled to the acceleration sensing mechanism, the pair of counter rotation members being spaced apart and arranged substantially orthogonally to opposite ends of a reaction beam, wherein the pair of counter rotation members and the reaction beam are structured such that a linear displacement aligned with the reaction beam and applied to the respective mounting pads is balanced at the respective isolated pads by a responsive deflection of the respective counter rotation members that is generated by a moment that acts through the respective counter rotation members;
• b) a top cover plate formed of a second monocrystalline silicon substrate, the top cover plate including a peripheral bond area adhesively bonded to a first surface of the outer frame member;
• and
• c) a bottom cover plate formed of a third monocrystalline silicon substrate, the bottom cover plate including a peripheral bond area adhesively bonded to a second surface of the outer frame member opposite from the top cover plate.