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US 6,662,466 B2Granted
Method for two dimensional adaptive process control of critical dimensions during spin coating process
AssigneeASML Holdings N.V.
InventorsEmir Gurer, Tom Zhong, John W. Lewellen, Eddie Lee
Life of this patent
Estimating the term…
Abstract
A process for drying a polymeric material present on a substrate is provided. Temperatures of the polymeric material is measured and the ambient temperature in the vicinity of the substrate. A temperature of the substrate is also measured. A variation in the measured ambient temperature is detected. The substrate temperature, polymeric temperature, ambient temperature or a substrate drying spin speed is adjusted in response to the detected variation in the measured ambient temperature.
Claims48
A process for drying a polymeric material present on a substrate, comprising:
- selecting a process control system that includes a central processing unit (CPU) in communication with:
- (i) a plurality of temperature sensors, including a polymeric temperature sensor, an ambient temperature sensor, and a substrate temperature sensor, and (ii) a plurality of temperature controllers, including a polymeric temperature controller, an ambient temperature controller, and a substrate temperature controller;
- measuring a temperature of the polymeric material with the polymeric temperature sensor and an ambient temperature in the vicinity of the substrate with the ambient temperature sensor;
- determining a temperature of the substrate with the substrate temperature sensor;
- detecting a variation in the measured ambient temperature;
- and
- adjusting at least one of the substrate temperature, polymeric temperature and a substrate drying spin speed with the process control system in response to the detected variation in the measured ambient temperature.
4 more elements
A process for drying a polymeric material present on a substrate, comprising:
- selecting a process control system that includes a central processing unit (CPU) in communication with:
- (F) a plurality of temperature sensors, including a polymeric temperature sensor, an ambient temperature sensor, and a substrate temperature sensor, and (ii) a plurality of temperature controllers, including a polymeric temperature controller, an ambient temperature controller, and a substrate temperature controller;
- measuring a temperature of the polymeric material with the polymeric temperature sensor and an ambient temperature in the vicinity of the substrate with the ambient temperature sensor;
- determining a temperature of the substrate with the substrate temperature sensor;
- detecting a variation in the measured ambient temperature;
- and
- adjusting at least two of the substrate temperature, polymeric temperature and a substrate drying spin speed with the process control system in response to the detected variation in the measured ambient temperature.
4 more elements
A process for drying a polymeric material present on a substrate surface, comprising:
- selecting a process control system that includes a central processing unit (CPU) in communication with:
- (F) a plurality of temperature sensors, including a polymeric temperature sensor, an ambient temperature sensor, and a substrate temperature sensor, and (ii) a plurality of temperature controllers, including a polymeric temperature controller, an ambient temperature controller, and a substrate temperature controller;
- measuring a polymeric material temperature with the polymeric temperature sensor and an ambient temperature in the vicinity of the substrate with the ambient temperature sensor;
- determining a temperature of the substrate with the substrate temperature sensor;
- detecting a variation in the determined substrate temperature;
- and
- adjusting at least one of the polymeric temperature, ambient temperature and a substrate drying spin speed with the process control system in response to the detected variation in the measured substrate temperature.
4 more elements
A process for drying a polymeric material present on a substrate surface, comprising:
- selecting a process control system that includes a central processing unit (CPU) in communication with:
- (i) a plurality of temperature sensors, including a polymeric temperature sensor, an ambient temperature sensor, and a substrate temperature sensor, and (ii) a plurality of temperature controllers, including a polymeric temperature controller, an ambient temperature controller, and a substrate temperature controller;
- measuring a polymeric material temperature with the polymeric temperature sensor and an ambient temperature in the vicinity of the substrate with the ambient temperature sensor;
- determining a temperature of the substrate with the substrate temperature sensor;
- detecting a variation in the determined substrate temperature;
- and
- adjusting at least two of the polymeric temperature, ambient temperature and a substrate drying spin speed with the process control system in response to the detected variation in the measured substrate temperature.
4 more elements
A process for drying a polymeric material present on a substrate surface, comprising:
- selecting a process control system that includes a central Processing unit (CPU) in communication with:
- (i) a plurality of temperature sensors, including a polymeric temperature sensor, an ambient temperature sensor, and a substrate temperature sensor, and (ii) a plurality of temperature controllers, including a polymeric temperature controller, an ambient temperature controller, and a substrate temperature controller;
- measuring a temperature of the polymeric material with the polymeric temperature sensor and an ambient temperature in the vicinity of the substrate with the ambient temperature sensor;
- determining a temperature of the substrate with the substrate temperature sensor;
- detecting a variation in the measured polymeric temperature;
- and
- adjusting at least one of the substrate temperature, ambient temperature and a substrate drying spin speed with the process control system in response to the detected variation in the measured polymeric temperature.
4 more elements
A process for drying a polymeric material present on a substrate surface, comprising:
- selecting a process control system that includes a central processing unit (CPU) in communication with:
- (i) a plurality of temperature sensors, including a polymeric temperature sensor, an ambient temperature sensor, and a substrate temperature sensor, and (ii) a plurality of temperature controllers, including a polymeric temperature controller, an ambient temperature controller, and a substrate temperature controller;
- measuring a temperature of the polymeric material with the polymeric temperature sensor and an ambient temperature in the vicinity of the substrate with the ambient temperature sensor;
- determining a temperature of the substrate with the substrate temperature sensor;
- detecting a variation in the measured polymeric temperature;
- and
- adjusting at least one of the substrate temperature, ambient temperature and a substrate drying spin speed with the process control system in response to the detected variation in the measured polymeric temperature.
4 more elements
Dependencies are inferred from the claim text.