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AssigneeKoninklijke Philips Electronics N.V.
InventorTheo Anjes Maria Ruijl
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Precision measuring apparatus like Co-ordinate Measuring Machines (CMMs) are very susceptible to deformations due to temperature variations and gradients. In a known CCM such variations are counteracted by providing parts of the apparatus with an insulating PUR layer. According to the invention the metrology frame 2 of the measuring apparatus is provided with a heat shield 12, 15 which includes an inner layer 12, having a comparatively high heat resistance, and an outer layer (14) which has a comparatively low heat resistance. Temperature gradients causing deformations of the metrology frame 2 are thus effectively reduced, whereas homogeneous temperature variations can be easily compensated for by means of software correction. Moreover, the shield acts as a low-pass filter which reduces the temperature disturbances due to short-term heat inputs.
An apparatus for the measurement or machining of an object (6), which apparatus is provided with positioning means for positioning a part of the apparatus (8) that is to be positioned relative to a frame of the apparatus, which frame of the apparatus includes a metrology frame (2) for determining information concerning the position of the part, said metrology frame is provided at least partly with a thermal shield (12, 14), characterized in that the thermal shield consists of at least an inner shielding layer (12) and an outer shielding layer (14), which outer shielding layer has a thermal conductivity which is higher than that of the inner shielding layer.
Dependencies are inferred from the claim text.