Manufacturing method of ceramic device using mixture with photosensitive resin
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsSang Kyeong Yun, Dong Hoon Kim, Sung June Park
Life of this patent
Estimating the term…
Abstract
A manufacturing method of ceramic device comprising the steps of forming by layer accumulation of a lower electrode, a piezoelectric/electrostrictive layer, and an upper electrode on a substrate using a mixture of photosensitive resin and metal or piezoelectric/electrostrictive ceramic; and patterning by light exposure at a single time, thereby, producing a ceramic device of high shape ratio can be produced and precision degree is very high so as to produce a ceramic device very precise in arrangement between layers or with infrastructure so that another effect may be made to systematically prevent the short between upper and lower electrodes.
Claims5
A method for manufacturing a ceramic device using a mixture with photosensitive resin comprising the steps of:
- providing a ceramic substrate;
- forming a lower electrode on said substrate having a mixture of photosensitive resin and metal;
- forming a piezoelectric/electrostrictive layer on said lower electrode having a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic;
- forming an upper electrode on said piezoelectric/electrostrictive layer having a mixture of photosensitive resin and metal;
- and
- patterning said lower electrode, said piezoelectric/electrostrictive layer, and said upper electrode at the same time by light exposure after masking said upper electrode in a desired pattern.
Dependencies are inferred from the claim text.