US 6,662,143 B2 · Measuring method and measuring device

Abstract

An object of the present invention is to provide a measuring device and a measuring method capable of determining the number of averaging (the number of measurements automatically made in the measuring device) in the measuring device performing averaging process (automatically making plural measurements on a certain characteristic amount of a sample, and performing a process such as weight assignment, thereby obtaining an average value of measured results obtained from the plural measurements and outputting the average value as the measured result of the sample) while maintaining compatibleness of required measuring accuracy and efficiency in measurements. 1/ε12·(σi/σs)2·N0 is calculated using a standard deviation σi obtained from plural measurements made on one of a plurality of samples, a standard deviation σs obtained from measurements made on the plurality of samples, an initial value N0 of the number of averaging and a desired ratio of uncertainties ε1, and an integer not lower than the calculated result is employed as the number of averaging N. Then, the averaging process is again performed on each of the plurality of samples by the number of averaging N while performing measurements, thereby calculating the standard deviation σs.

Claims12

Dependent claims

A measuring method of making measurements on a predetermined characteristic amount of a plurality of samples and obtaining a standard deviation of said predetermined characteristic amount of said plurality of samples, wherein

averaging process of making measurements by the predetermined number N0 and obtaining an average value of measured results is performed in each one of said measurements, said measuring method comprising the steps of:
(a) making plural measurements on said predetermined characteristic amount of one of said plurality of samples under the same condition, thereby calculating a standard deviation σi of said one of said plurality of samples from measured results of said measurements;
(b) making a measurement on said predetermined characteristic amount of each of said plurality of samples under the same condition, thereby calculating a standard deviation σs of said plurality of samples from said measured results of said measurements;
(c) obtaining the number of averaging N using said standard deviations σi and σs and the predetermined number N0;
and
(d) performing again said averaging process by the number of averaging N while measuring said predetermined characteristic amount, and calculating said standard deviation σs of said plurality of samples from measured results of said measurements made on said plurality of samples.

3 more elements

A measuring device comprising:

measuring means for measuring a predetermined characteristic amount of a plurality of samples;
first calculating means for calculating a standard deviation of said predetermined characteristic amount;
second calculating means for calculating the number of averaging N;
and
controlling means for controlling said measuring means and first and second calculating means, and causing said measuring means to make measurements by the predetermined number N0 in each of said measurements, thereby performing averaging process of obtaining an average value of measured results, wherein
said measuring means makes plural measurements on said predetermined characteristic amount of one of said plurality of samples under the same condition,
said controlling means provides said first calculating means with measured results of said plural measurements made by said measuring means, thereby causing said first calculating means to calculate a standard deviation σi of said one of said plurality of samples,
said measuring means further makes a measurement on said predetermined characteristic amount of each one of said plurality of samples under the same condition,
said controlling means provides said first calculating means with each of said measured results of said measurements made on said plurality of samples by said measuring means, thereby causing said first calculating means to calculate a standard deviation σs of said plurality of samples,
said controlling means provides said second calculating means with said standard deviations σi and σs obtained by said first calculating means and the predetermined number N0, thereby causing said second calculating means to calculate the number of averaging N,
said controlling means again performs averaging process on each of said plurality of samples by the number of averaging N, while causing said measuring means to measure said predetermined characteristic amount, and providing said first calculating means with each of said measured results of said plurality of samples made by said measuring means, thereby causing said first calculating means to calculate a standard deviation σs of said plurality of samples based on said measurement results of said plurality of samples so as to be outputted.

8 more elements

Dependencies are inferred from the claim text.

Measuring method and measuring device

Life of this patent

Measuring method and measuring device

Life of this patent

Abstract

Claims12