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US 6,661,938 B2Granted
Optical micro-cavity sensors
AssigneeMassachusetts Institute of Technology
InventorsDesmond R. Lim, Anuradha Agarwal, Lionel C. Kimerling
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Abstract
An integrated optical sensor using optical waveguide micro-cavity resonators. Using a laser and a detector it is possible to detect changes in the position of the resonance position, in wavelength or frequency, of one or more modes of the resonator. The change in resonance can be made dependent on chemicals, which have been adsorbed by chemically or biologically sensitive material provided in close proximity to the resonator.
Claims13
An integrated optical sensor comprising:
- an optical planar waveguide micro-resonator device;
- and
- means for measuring change in resonance position, in wavelength or frequency, of one or more modes of said micro-resonator device, wherein the difference in position, in wavelength or frequency, of two or more modes is measured.
An integrated optical sensor comprising:
- at least one optical waveguide micro-resonator device;
- and
- means for measuring change in resonance position, in wavelength or frequency, of one or more modes of said at least one micro-resonator devices a sensor, said means including a light source, wherein the change in position of wavelength is determined by tuning said micro-resonator device and keeping the frequency of said light sourced fixed.
Dependencies are inferred from the claim text.