Buffer layer structures for stabilization of a lithium niobate device
AssigneeCodeon Corporation
InventorsWilliam K. Burns, Larry A. Hess, Vishal Agarwal
Life of this patent
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Abstract
An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.
Claims5
An optical waveguide device comprising:
- an electro-optical crystal substrate having a top surface and a bottom surface;
- an optical waveguide path formed within a surface of the electro-optical crystal substrate;
- at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path;
- a silicon titanium oxynitride layer;
- a connector for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed;
- and
- an additional silicon titanium oxynitride layer for temporal stabilization doped with a metal from columns 3-16 of the Periodic Table, in metal or oxide form, is positioned between the silicon titanium oxynitride layer and the electro-optical crystal substrate.
An optical waveguide device comprising:
- an electro-optical crystal substrate having a top surface and a bottom surface;
- an optical waveguide path formed within a surface of the electro-optical crystal substrate;
- at least one electrode-positioned above the optical waveguide path for applying an electric field to the optical waveguide path;
- a silicon titanium oxynitride layer, wherein a ratio of silicon to titanium in the silicon titanium oxynitride layer is formed with a gradient change in the ratio of silicon to titanium and the silicon titanium oxynitride layer is doped with a metal from columns 3-16 of the Periodic Table, in metal or oxide form;
- and
- a connector for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.
An optical waveguide device comprising:
- a Z-cut electro-optical crystal substrate having a top surface with a Z face and a bottom surface with a Z face;
- an optical waveguide path formed within the top surface of the electro-optical crystal substrate;
- an undoped silicon dioxide layer is positioned on a top surface of the electro-optical crystal substrate for optical confinement of an optical signal within the optical waveguide path;
- and
- a temporal and thermal stabilization buffer layer positioned between the thermal stabilization buffer layer and the electro-optical crystal substrate, wherein the buffer layer is doped with a metal from columns 3-16 of the Periodic Table, in metal or oxide form;
- at least one electrode positioned on the buffer layer structure for applying an electric field to the optical waveguide path;
- and
- a connector for interconnecting the buffer layer to the bottom surface of the Z-cut electro-optical crystal substrate.
Dependencies are inferred from the claim text.