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US 6,661,829 B2Granted
Vertical cavity surface emitting laser
OwnerHeon-su Jeoninventor
Life of this patent
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Abstract
Provided is a vertical cavity surface emitting laser (VCSEL) including a feedback member which feeds a portion of light externally emitted from a resonator for generating and amplifying a laser beam, back into the resonator by reflecting the same and acts as a concave mirror for the resonator. The VCSEL operates predominantly in the single fundamental transverse mode, emitting a laser output having a peak intensity at its center. The VCSEL can be manufactured by a simple process and provides excellent reproducibility.
Claims17
A vertical cavity surface emitting laser comprising:
- a substrate;
- a first reflector layer formed on a surface of the substrate;
- an active layer formed on the first reflector layer to generate light emission;
- a second reflector layer formed on the active layer, the first and the second reflector layers forming a resonator to generate a laser beam from the light emission;
- and
- a feedback member formed on at least one of a top surface of the second reflector layer and a bottom surface of the substrate so that the feedback member is positioned to receive the laser beam emitted from the resonator through a respective one of the first and second reflector layers,
- the feedback member serving to reflect and feed a portion of the laser beam emitted from the resonator back into the resonator, the feedback member being formed of a material transparent to the wavelength of the laser beam,
- the respective one of the first and second reflector layers having a reflectivity relatively lower than a reflectivity of the other of the first and second reflector layers.
5 more elements
Dependencies are inferred from the claim text.