Laser chamber insulator with sealed electrode feedthrough
AssigneeCymer, Inc.
InventorsRichard C. Ujazdowski, Timothy S. Dyer, William N. Partlo, Michael Altheim, Brian Strate, Thomas Hofmann
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AssigneeCymer, Inc.
InventorsRichard C. Ujazdowski, Timothy S. Dyer, William N. Partlo, Michael Altheim, Brian Strate, Thomas Hofmann
Estimating the term…
A feedthrough structure of a gas discharge laser chamber conducts electric power through the wall of a sealed gas enclosure to a single piece elongated electrode inside the enclosure. The feedthrough structure includes a single piece integrated main insulator larger than the electrode. The main insulator is compressed between the electrode and the wall of the enclosure. The surfaces forming interfaces between the electrode and the single piece insulator are the insulator and the wall are all very smooth to permit the parts to expand and contract as the chamber temperature varies. The feedthrough structure also provides mechanical support and alignment for the electrode and includes seals to prevent gas leakage around the feedthrough structure.
An apparatus for conducting high electric power through the wall of a sealed chamber of an electric discharge laser to an elongated electrode inside the chamber, defining an electrode length, comprising:
An apparatus for conducting high electric power through the wall of a sealed chamber of an electric discharge laser to an elongated electrode inside the chamber, defining an electrode length, comprising:
Dependencies are inferred from the claim text.